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학술지 High Sensitive NO2 Gas Sensor with Low Power Consumption Using Selectively Grown ZnO Nanorods
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저자
박소정, 박종혁, 이홍열, 문승언, 박강호, 김종대, 맹성렬, F. Udrea, W. I. Milne, 김규태
발행일
201005
출처
Journal of Nanoscience and Nanotechnology, v.10 no.5, pp.3385-3388
ISSN
1533-4880
출판사
American Scientific Publishers (ASP)
DOI
https://dx.doi.org/10.1166/jnn.2010.2261
협약과제
09MB1500, 유비쿼터스 단말용 부품 모듈, 김종대
초록
The noble gas sensor using multiple ZnO nanorods was fabricated with CMOS compatible process and sol-gel growth method on selective area and gas response characteristics to NO 2 gas of the sensor device were investigated. We confirmed the sensors had high sensitive response denoted by the sensitivity of several tens for NO 2 gas sensing and also showed pretty low power consumption close to 20 mW even though the recovery of resistance come up to almost the initial value. Copyright © 2010 American Scientific Publishers All rights reserved.
키워드
Micro heater, Semiconducting gas sensor, Sol-Gel growth method, ZnO nanorods
KSP 제안 키워드
CMOS compatible process, Gas response, Gas sensing, Growth method, High sensitive, Initial value, Micro-heater, NO 2, Response characteristics, Selective area, Sensitive response