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학술지 Gas Sensitivity Modulation of Oxide Thin Films by Means of an Electrical Method
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저자
문제현, 박진아, 이수재, 추혜용, 정태형, Il-Doo Kim
발행일
201007
출처
Sensors and Actuators B : Chemical, v.148 no.2, pp.539-543
ISSN
0925-4005
출판사
Elsevier
DOI
https://dx.doi.org/10.1016/j.snb.2010.04.050
협약과제
09ZH1300, ETRI 연구역량 강화를 위한 R&D체계 구축 및 Seed형 기술개발을 위한 창의형 연구 사업, 현창희
초록
To enhance the sensitivity of a metal oxide-based gas sensor, we introduce a novel electrical method that relies jointly on the use of impedance and an applied DC bias. We used polycrystalline ZnO-NiO composite thin films prepared by pulsed layer deposition as CO gas sensor material. The applied DC bias lowers the interface barrier between oxide grains and thereby enhances the sensitivity. Our approach enhances the sensitivity to CO gas by approximately 200% more than a conventional DC method. The enhancement effect is more pronounced when the CO concentration is lowered. This method offers an efficient characterization tool for modulating the sensitivity of gas sensors using semiconducting metal oxides. © 2010 Elsevier B.V.
키워드
DC bias, Impedance spectroscopy, Metal oxide, Pulsed laser deposition, Sensitivity
KSP 제안 키워드
CO concentration, CO gas sensor, Characterization tool, DC method, Impedance spectroscopy(IS), Layer deposition, Metal-oxide(MOX), NiO composite, Oxide thin films, Pulsed-laser deposition(PLD), Semiconducting metal oxides