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학술지 High-Response and Low-Power-Consumption CO Micro Gas Sensor Based on Nano-Powders and a Micro-Heater
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저자
문승언, 이재우, 최낙진, 이형근, 양우석, 김종대, 박용주
발행일
201201
출처
한국물리학회, v.60 no.2, pp.235-239
ISSN
0374-4884
출판사
한국물리학회
DOI
https://dx.doi.org/10.3938/jkps.60.235
협약과제
11MB2100, 스마트and그린 빌딩용 자가충전 지능형 센서노드 플랫폼 핵심기술 개발, 김종대
초록
In this research, a CO micro gas sensor was fabricated based on a micro-heater by using a tin oxide nano-powder for effective gas detection and a monitoring system with low power consumption and high sensitivity. Tin-oxide-based nano-powders were fabricated using a conventional method and their structural properties were examined by using the scanning electron microscope, X-ray diffractor, etc. Membrane type micro-heater based on Si substrate was fabricated by using complementary metal-oxide semiconductor (CMOS) compatible micro electro mechanical systems (MEMS) process by using bulk micromachining. The gas sensing properties for slurry-dropped tin oxide thick film device were measured for CO gas. The micro gas sensors showed high sensitivity and low power consumption, about 15 mW power consumption, 2 ppm CO could be detected. © 2012 The Korean Physical Society.
키워드
Micro gas sensor, Micro-heater, Nano-powder
KSP 제안 키워드
Bulk Micromachining, CO gas, Complementary metal-oxide-semiconductor(CMOS), Conventional methods, Film device, Gas detection, Gas sensing properties, High Sensitivity, Metal-oxide(MOX), Micro gas sensor, Micro-electro-mechanical system(MEMS)