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학술지 Fabrication of Dual-focus Dual-layered Microlens
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저자
이종무, 이동효, 백용순
발행일
201302
출처
Optics Communications, v.289, pp.69-74
ISSN
0030-4018
출판사
North-Holland
DOI
https://dx.doi.org/10.1016/j.optcom.2012.09.076
협약과제
11MB5800, 6"급 에피웨이퍼 기반 수직형 LED 칩용 Laser Lift-off 장비 개발, 이종무
초록
Novel structure of dual-focus microlens array with dual layers is proposed. Dual-focus microlenses formed by combination of dual layers of concentric spherical lenses are fabricated through photo lithography and dry etching processes. The dual lens is formed by combination of a thermally reflowed photo resist lens on a fused quartz lens which is formed by dry etching of the fused quartz substrate. © 2012 Elsevier B.V.
키워드
Integrated optics, Optical devices, Optical elements
KSP 제안 키워드
Dry etching processes, Fused quartz, Integrated optics, Microlens array, Optical devices, Optical element, Photo resist, Photo-lithography, Quartz substrate