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학술지 Interface-Engineered Amorphous TiO2-Based Resistive Memory Devices
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정후영, 이정용, 최성율
Advanced Functional Materials, v.20 no.22, pp.3912-3917
John Wiley & Sons
09MB7200, 플렉서블 PoRAM 소재 원천기술 개발, 최성율
Crossbar-type bipolar resistive memory devices based on low-temperature amorphous TiO2 (a-TiO2) thin films are very promising devices for flexible nonvolatile memory applications. However, stable bipolar resistive switching from amorphous TiO2 thin films has only been achieved for Al metal electrodes that can have severe problems like electromigration and breakdown in real applications and can be a limiting factor for novel applications like transparent electronics. Here, amorphous TiO 2-based resistive random access memory devices are presented that universally work for any configuration of metal electrodes via engineering the top and bottom interface domains. Both by inserting an ultrathin metal layer in the top interface region and by incorporating a thin blocking layer in the bottom interface, more enhanced resistance switching and superior endurance performance can be realized. Using high-resolution transmission electron microscopy, point energy dispersive spectroscopy, and energy-filtering transmission electron microscopy, it is demonstrated that the stable bipolar resistive switching in metal/a-TiO2/metal RRAM devices is attributed to both interface domains: the top interface domain with mobile oxygen ions and the bottom interface domain for its protection against an electrical breakdown. Engineering of both interface domains in amorphous TiO2-based RRAM devices makes it possible that the devices are operated at any configuration of metal electrodes. By inserting an active thin metal layer at the top interface and embedding an Al2O3 blocking layer at the bottom interface, enhanced memory properties can be obtained compared to the conventional Al/a-TiO2/Al devices. Copyright © 2010 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.
bipolar resistive switching, interface control, resistive random access memory, titanium oxide
KSP 제안 키워드
Amorphous TiO 2, Bipolar resistive switching, Co. KGaA, Electrical breakdown, Energy Dispersive Spectroscopy, Flexible nonvolatile memory, Interface region, Limiting factors, Low temperature(LT), Memory applications, Memory properties