Subjects : controlled voltage source
| Type | Year | Title | Cited | Download |
|---|---|---|---|---|
| Journal | 2016 | TiN/PECVD-Si3N4/TiN Diaphragm-based Capacitive-type MEMS Acoustic Sensor Jaewoo Lee Electronics Letters, v.52, no.6, pp.468-470 | 6 | 원문 |
| Status | Year | Patent Name | Country | Family Pat. | KIPRIS |
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| Type | Year | Research Project | Primary Investigator | Download |
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