Subjects : Quadrupole mass spectrometer
Type | Year | Title | Cited | Download |
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Journal | 2010 | Etching Characteristics and Mechanism of ZnO and Ga-Doped ZnO Thin Films in Inductively Coupled HBr/Ar/CHF3 Plasma 함용현 Japanese Journal of Applied Physics, v.49, no.8 PART 2, pp.1-5 | 5 | 원문 |
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Type | Year | Research Project | Primary Investigator | Download |
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