Subjects : Argon plasma
Type | Year | Title | Cited | Download |
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Journal | 2017 | Surface Nanostructuring of CuIn1_xGaxSe2 Films using Argon Plasma Treatment S P Zimin Semiconductor Science and Technology, v.32, no.7, pp.1-8 | 6 | 원문 |
Journal | 1998 | High-Quality Conformal Silicon Oxide Films Prepared by Multi-Step Sputtering PECVD and Chemical Mechanical Polishing Min Park Journal of Electronic Materials, v.27, no.11, pp.1262-1267 | 9 | 원문 |
Status | Year | Patent Name | Country | Family Pat. | KIPRIS |
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Type | Year | Research Project | Primary Investigator | Download |
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