Subjects : circuit-integrated
| Type | Year | Title | Cited | Download |
|---|---|---|---|---|
| Journal | 2016 | Surface Micromachined Pressure Sensor with Substrate Internal Vacuum Cavity Chang Han Je ETRI Journal, v.38, no.4, pp.685-694 | 2 | 원문 |
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| Type | Year | Research Project | Primary Investigator | Download |
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