Subjects : Direct etching
| Type | Year | Title | Cited | Download |
|---|---|---|---|---|
| Conference | 2016 | High Sensitivity Surface Micromachined Absolute Pressure Sensor Chang Han Je Eurosensors 2016, pp.1-4 | 18 | 원문 |
| Status | Year | Patent Name | Country | Family Pat. | KIPRIS |
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| Type | Year | Research Project | Primary Investigator | Download |
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