Subjects : Sub-50 nm
| Type | Year | Title | Cited | Download |
|---|---|---|---|---|
| Journal | 2010 | Sub-50 nm Template Fabrications for Nanoimprint Lithography Using Hydrogen Silsesquioxane and Silicon Nitride Shim Jae Yeob Journal of Nanoscience and Nanotechnology, v.10, no.5, pp.3628-3630 | 4 | 원문 |
| Status | Year | Patent Name | Country | Family Pat. | KIPRIS |
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| Type | Year | Research Project | Primary Investigator | Download |
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