Subjects : Thermally Grown Oxide
| Type | Year | Title | Cited | Download |
|---|---|---|---|---|
| Journal | 1998 | High-Quality Conformal Silicon Oxide Films Prepared by Multi-Step Sputtering PECVD and Chemical Mechanical Polishing Min Park Journal of Electronic Materials, v.27, no.11, pp.1262-1267 | 9 | 원문 |
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