Subject

Subjects : Conformal deposition

  • Articles (1)
  • Patents (0)
  • R&D Reports (0)
논문 검색결과
Type Year Title Cited Download
Journal 2011 Conformal Deposition of an Insulator Layer and Ag Nano Paste Filling of a through Silicon Via for a 3D Interconnection   Baek Kyu-Ha  Journal of the Korean Physical Society, v.59, no.3, pp.2252-2258 10 원문
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