Subjects : optical emission spectroscopy
Type | Year | Title | Cited | Download |
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Journal | 2014 | Surface Properties of ZrO2 Thin Film Under Cl2/Ar Plasma Using Angle-Resolved X-Ray Photoelectron Spectroscopy Woo Jong Chang Japanese Journal of Applied Physics, v.53, no.8S3, pp.1-6 | 3 | 원문 |
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