Subjects : Xenon difluoride
Type | Year | Title | Cited | Download |
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Conference | 2013 | A Surface Micromachined MEMS Capacitive Microphone with Back-Plate Supporting Pillars Chang Han Je SENSORS 2013, pp.1-4 | 6 | 원문 |
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Type | Year | Research Project | Primary Investigator | Download |
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