Subjects : Out-of-plane deformation
| Type | Year | Title | Cited | Download |
|---|---|---|---|---|
| Conference | 2008 | Deformation Reduction of a MEMS Sensor by Stress Balancing of Multilayer Yang Woo Seok International Conference on Sensor Technologies and Applications (SENSORCOMM) 2008, pp.391-395 | 4 | 원문 |
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| Type | Year | Research Project | Primary Investigator | Download |
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