Subjects : scanning micromirror
| Type | Year | Title | Cited | Download |
|---|---|---|---|---|
| Conference | 2002 | Design of electrostatic actuators for MOEMS applications Dooyoung Hah Design, Test, Integration, and Packaging of MEMS/MOEMS 2002 (SPIE 4755), pp.200-207 | 24 | 원문 |
| Status | Year | Patent Name | Country | Family Pat. | KIPRIS |
|---|---|---|---|---|---|
| No search results. | |||||
| Type | Year | Research Project | Primary Investigator | Download |
|---|---|---|---|---|
| No search results. | ||||