Subjects : Circular diaphragm
| Type | Year | Title | Cited | Download |
|---|---|---|---|---|
| Journal | 2016 | Surface Micromachined Pressure Sensor with Substrate Internal Vacuum Cavity Chang Han Je ETRI Journal, v.38, no.4, pp.685-694 | 2 | 원문 |
| Status | Year | Patent Name | Country | Family Pat. | KIPRIS |
|---|---|---|---|---|---|
| No search results. | |||||
| Type | Year | Research Project | Primary Investigator | Download |
|---|---|---|---|---|
| No search results. | ||||