Subjects : Equivalent electrical circuit
Type | Year | Title | Cited | Download |
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Journal | 2019 | Wafer-Level-Based Open-Circuit Sensitivity Model from Theoretical ALEM and Empirical OSCM Parameters for a Capacitive MEMS Acoustic Sensor Jaewoo Lee Sensors, v.19, no.3, pp.1-14 | 2 | 원문 |
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