학술지
|
2023 |
Characteristics of Ultrathin Indium Oxide Thin-Film Transistors with Diverse Channel Lengths Fabricated by Atomic Layer Deposition
이주훈 Physica Status Solidi (B): Basic Research, v.권호미정, pp.1-6 |
0 |
원문
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학술대회
|
2023 |
Importance of contact resistance on the device mobility of ultra-thin indium oxide formed by atomic layer deposition
이주훈 Compound Semiconductor Week (CSW) 2023, pp.611-612 |
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학술대회
|
2023 |
Optical and electrical stability of single-layer Indium oxide thin-film transistors fabricated using atomic layer deposition with a novel indium precursor(SBIP-03)
이주훈 Materials Research Society (MRS) Meeting 2023 (Spring), pp.1-1 |
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학술대회
|
2022 |
Characteristics of thin-body indium oxide thin-film transistors with diverse channel length fabricated by atomic layer deposition
이주훈 International Conference on Electronic Materials and Nanotechnology for Green Environment (ENGE) 2022, pp.1-1 |
|
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학술지
|
2022 |
Characteristics of PEALD-Hafnium Dioxide Films and their Application to Gate Insulator Stacks of Photosynaptic Transistors
김지은 Advanced Electronic Materials, v.8 no.4, pp.1-8 |
3 |
원문
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학술지
|
2021 |
Synaptic Transistors Exhibiting Gate-Pulse-Driven, Metal-Semiconductor Transition of Conduction
임정욱 Materials, v.14 no.24, pp.1-8 |
2 |
원문
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학술지
|
2021 |
Organic/Inorganic Hybrid Thin-Film Encapsulation Using Inkjet Printing and PEALD for Industrial Large-Area Process Suitability and Flexible OLED Application
권병화 ACS Applied Materials & Interfaces, v.13 no.46, pp.54621-55766 |
18 |
원문
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학술지
|
2021 |
Optimizing Oxide Mixing Ratio for Achieving Energy-Efficient Oxide Thin-Film Transistors
문제현 Physica Status Solidi (A) - Applications and Materials Science, v.218 no.16, pp.1-5 |
1 |
원문
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학술지
|
2021 |
Photoinduced Synaptic Behavior of InxTiyO Thin Film Transistors
임정욱 Advanced Electronic Materials, v.7 no.4, pp.1-7 |
7 |
원문
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학술지
|
2021 |
Growth and Device Properties of ALD Deposited ZnO Films for CIGS Solar Cells
Vinaya Kumar Arepalli Materials Science in Semiconductor Processing, v.121, pp.1-8 |
12 |
원문
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학술지
|
2021 |
Effects of Moisture-Proof Back Passivation Layers of Al2O3 and AlxTi1-xOy Films on Efficiency Improvement and Color Modulation in Transparent a-Si:H Solar Cells
김지은 ACS Applied Materials & Interfaces, v.13 no.4, pp.4968-4974 |
9 |
원문
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학술지
|
2020 |
친환경 컬러 Cu(In,Ga)Se2 박막 태양전지 기술
정용덕 세라미스트, v.23 no.4, pp.389-406 |
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원문
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학술대회
|
2020 |
친환경 컬러 Cu(In,Ga)Se2 박막 태양전지 기술
정용덕 한국물리학회 학술 논문 발표회 (가을) 2020, pp.1-1 |
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학술지
|
2019 |
Film Thickness-dependent Ferroelectric Polarization Switching Dynamics of Undoped HfO2 Thin Films Prepared by Atomic Layer Deposition
최세나 Ceramics International, v.45 no.17, pp.22642-22648 |
26 |
원문
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학술지
|
2019 |
All-oxide Thin-film Transistors with Channels of Mixed InOx-ZnOy Formed by Plasma-enhanced Atomic Layer Deposition Process
이정무 Journal of Vacuum Science and Technology A, v.37 no.6, pp.1-7 |
7 |
원문
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학술대회
|
2019 |
Development of Inorganic/Organic Thin Film Encapsulation by using Atomic Layer Deposition and Ink-jet Printing Process
권병화 International Conference on Advanced Electromaterials (ICAE) 2019, pp.1-1 |
|
|
학술지
|
2019 |
Polarization Switching Kinetics of the Ferroelectric Al-doped HfO2 Thin Films Prepared by Atomic Layer Deposition with Different Ozone Doses
윤소정 Journal of Vacuum Science and Technology B, v.37 no.5, pp.1-6 |
32 |
원문
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학술지
|
2019 |
Fab-compatible Nano-lens Array Integration for Optically Efficient Flexible Top-emitting Organic Light-emitting Diodes
박영삼 Japanese Journal of Applied Physics, v.58 no.SD, pp.1-6 |
4 |
원문
|
학술지
|
2019 |
Fab-compatible Nano-lens Array Integration for Optically Efficient Flexible Top-emitting Organic Light-emitting Diodes
권정윤 Japanese Journal of Applied Physics, v.58 no.SD, pp.1-6 |
4 |
원문
|
학술지
|
2019 |
Fab-compatible Nano-lens Array Integration for Optically Efficient Flexible Top-emitting Organic Light-emitting Diodes
김제한 Japanese Journal of Applied Physics, v.58 no.SD, pp.1-6 |
4 |
원문
|
학술지
|
2018 |
High mobility Ultra-thin Crystalline Indium Oxide Thin Film Transistor Using Atomic Layer Deposition
이종찬 Applied Physics Letters, v.113 no.11, pp.1-5 |
44 |
원문
|
학술대회
|
2018 |
High Mobility Transparent Thin Film Transistor with 5nm-Indium Oxide by Atomic Layer Deposition
이종찬 International Meeting on Information Display (IMID) 2018, pp.535-535 |
|
|
학술지
|
2018 |
Enhanced Carrier Transport Properties in GaN-Based Metal-Insulator-Semiconductor High Electron Mobility Transistor with SiN/Al2O3 Bi-Layer Passivation
장성재 ECS Journal of Solid State Science and Technology, v.7 no.6, pp.86-90 |
7 |
원문
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학술대회
|
2018 |
The Effect of Aluminum in the Oxide Thin-Film Transistor
최지훈 European Materials Research Society (E-MRS) Meeting 2018 (Spring), pp.1-1 |
|
|
학술지
|
2017 |
Thermal Conductivity and Thermal Boundary Resistances of ALD Al2O3 Films on Si and Sapphire
이승민 International Journal of Thermophysics, v.38 no.12, pp.1-10 |
4 |
원문
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학술지
|
2017 |
A Single-Chamber System of Initiated Chemical Vapor Deposition and Atomic Layer Deposition for Fabrication of Organic/Inorganic Multilayer Films
김봉준 Advanced Engineering Materials, v.19 no.6, pp.1-9 |
20 |
원문
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학술지
|
2016 |
Improved Stability of Electrical Properties of Nitrogen-added Al2O3 Films Grown by PEALD as Gate Dielectric
이다정 Materials Research Bulletin, v.83, pp.597-602 |
9 |
원문
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학술지
|
2016 |
Effect of Fluoride-based Plasma Treatment on the Performance of AlGaN/GaN MISHFET
안호균 ETRI Journal, v.38 no.4, pp.675-684 |
4 |
원문
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학술대회
|
2015 |
A Study on the Physical and Electrical Properties of Indium Oxide/Zinc Oxide Heterostructured Thin Films Deposited by Plasma Enhanced Atomic Layer Deposition
이정무 International Conference on Advanced Materials and Devices (ICAMD) 2015, pp.1-1 |
|
|
학술대회
|
2015 |
The Effect of Annealing Treatment on Indium Oxide/Zinc Oxide Heterostructured Thin Films Transistors Grown by Plasma Enhanced Atomic Layer Deposition
이환재 International Conference on Advanced Materials and Devices (ICAMD) 2015, pp.1-1 |
|
|
학술대회
|
2015 |
Growth Characteristics and Electrical Properties of Aluminum Oxide and Tin Oxide Superlattice Thin Films by Atomic Layer Deposition
이정무 International Conference on Advanced Electromaterials (ICAE) 2015, pp.1-1 |
|
|
학술대회
|
2015 |
Effect of Post-Annealing Temperatures on SnO2/Al2O3 Superlattice Thin Fiim Transistors Grown by Atomic Layer Deposition
이환재 International Conference on Advanced Electromaterials (ICAE) 2015, pp.1-1 |
|
|
학술대회
|
2015 |
The Effect of Post-Annealing on Bias Stability of InOx/ZnO Superlattice Thin Film Transistors Grown by Plasma Enhanced Atomic Layer Deposition
이환재 Asian-European International Conference on Plasma Surface Engineering (AEPSE) 2015, pp.1-1 |
|
|
학술대회
|
2015 |
Growth Characteristics and Electrical Properties of Indium Oxide and Zinc Oxide Superlattice Thin Films by Plasma Enhanced Atomic Layer Deposition
이정무 Asian-European International Conference on Plasma Surface Engineering (AEPSE) 2015, pp.1-1 |
|
|
학술대회
|
2015 |
Thermal Conductivity of Thin Film Al2O3 Grown by Atomic Layer Deposition
김준수 European Materials Research Society (E-MRS) Meeting 2015 (Spring), pp.1-1 |
|
|
학술지
|
2014 |
A Thin Film Encapsulation Layer Fabricated via Initiated Chemical Vapor Deposition and Atomic Layer Deposition
김봉준 Journal of Applied Polymer Science, v.131 no.24, pp.1-7 |
22 |
원문
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학술지
|
2014 |
Normally-Off Dual Gate AlGaN/GaN MISFET with Selective Area-Recessed Floating Gate
안호균 Solid-State Electronics, v.95, pp.42-45 |
15 |
원문
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학술지
|
2014 |
Vertical Channel ZnO Thin-Film Transistors Using an Atomic Layer Deposition Method
황치선 IEEE Electron Device Letters, v.35 no.3, pp.360-362 |
50 |
원문
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학술지
|
2013 |
Flexible and Transparent MoS2 Field-Effect Transistors on Hexagonal Boron Nitride-Graphene Heterostructures
이관형 ACS Nano, v.7 no.9, pp.7931-7936 |
941 |
원문
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학술지
|
2013 |
Fabrication of Ag Nanoparticles Embedded in TiO2 Nanotubes: Using Electrospun Nanofibers for Controlling Plasmonic Effects
정미희 Chemistry - A European Journal, v.19 no.26, pp.8543-8549 |
15 |
원문
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학술대회
|
2013 |
High Mobility Oxide TFT for Large Area High Resolution AMOLED
박상희 Society for Information Display (SID) International Symposium 2013, pp.18-21 |
10 |
원문
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학술지
|
2013 |
Double-Layered Passivation Film Structure of Al2O3/SiNx for High Mobility Oxide Thin Film Transistors
박상희 Journal of Vacuum Science and Technology B, v.31 no.2, pp.1-6 |
29 |
원문
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학술대회
|
2012 |
Study on the E/D - mode AlGaN/GaN MISFET with Al2O3 gate insulator grown by Atomic Layer Deposition
International Confernece on Microelectronics and Plasma Technology (ICMAP) 2012, pp.1-1 |
|
|
학술지
|
2012 |
Improved Stability of Atomic Layer Deposited ZnO Thin Film Transistor by Intercycle Oxidation
오힘찬 ETRI Journal, v.34 no.2, pp.280-283 |
15 |
원문
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학술대회
|
2011 |
TiO2 Nanotubes Fabricated by Atomic Layer Deposition for Solar Cells
한국진공학회 학술 대회 (하계) 2011, pp.161-161 |
|
|
학술지
|
2010 |
Fabrication of Self-Aligned TFTs with a Ultra-Low Temperature Polycrystalline Silicon Process on Metal Foils
문제현 Solid-State Electronics, v.54 no.11, pp.1326-1331 |
2 |
원문
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학술지
|
2010 |
A Low-Temperature-Grown TiO2-Based Device for the Flexible Stacked RRAM Application
정후영 Nanotechnology, v.21 no.11, pp.1-6 |
126 |
원문
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학술지
|
2010 |
Bipolar Resistive Switching in Amorphous Titanium Oxide Thin Film
정후영 Physica Status Solidi (RRL), v.4 no.1-2, pp.28-30 |
59 |
원문
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학술지
|
2010 |
Optical and Electrical Properties of AlxTi1-xO Films
임정욱 Journal of the Korean Physical Society, v.56 no.1, pp.96-99 |
3 |
원문
|
학술지
|
2010 |
Bipolar Resistive Switching in Amorphous Titanium Oxide Thin Film
정후영 Physica Status Solidi (RRL), v.4 no.1-2, pp.1-3 |
59 |
원문
|
학술지
|
2009 |
Optical and Electrical Properties of TixSi1-xOy Films
임정욱 ETRI Journal, v.31 no.6, pp.675-679 |
10 |
원문
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학술지
|
2009 |
비휘발성 메모리 응용을 위한 ALD법을 이용한 Al2O3 절연막의 특성
정순원 전기학회논문지, v.58 no.12, pp.2420-2424 |
|
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학술지
|
2009 |
Low Voltage Operation of Nonvolatile Ferroelectric Capacitors Using Poly(Vinylidene Fluoride-Trifluoroethylene) Copolymer and Thin Al2O3 Insulating Layer
정순원 Electrochemical and Solid-State Letters, v.12 no.9, pp.H325-H328 |
12 |
원문
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학술지
|
2009 |
Transparent and Photo-stable ZnO Thin-film Transistors to Drive an Active Matrix Organic-Light- Emitting-Diode Display Panel
박상희 Advanced Materials, v.21 no.6, pp.678-682 |
331 |
원문
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학술지
|
2009 |
Passivation of Bottom-Gate IGZO Thin Film Transistors
조두희 Journal of the Korean Physical Society, v.54 no.1, pp.531-534 |
43 |
원문
|
학술지
|
2009 |
Fabrication of Silicon-Oxide Thin Film by Using Ionized Physical Vapor Deposition and Application to Gate Insulators in Transparent Thin-Film Transistors
정우석 Journal of the Korean Physical Society, v.54 no.1, pp.473-477 |
1 |
원문
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학술지
|
2008 |
Thin-film Passivation by Atomic Layer Deposition for Organic Field-effect Transistors
전하영 Applied Physics Letters, v.93 no.16, pp.1-3 |
32 |
원문
|
학술지
|
2008 |
Voltage-Regulating Properties of AlxTi1_xOy Films Exhibiting an Abrupt Current Jump
임정욱 Electrochemical and Solid-State Letters, v.11 no.11, pp.G55-G57 |
0 |
원문
|
학술지
|
2008 |
Optical AlxTi1-xOy Films Grown by Plasma Enhanced Atomic Layer Deposition
임정욱 Japanese Journal of Applied Physics, v.47 no.8, pp.6934-6937 |
9 |
원문
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학술지
|
2008 |
Vanadium Dioxide Films Deposited on Amorphous SiO2- and Al2O3-Coated Si Substrates by Reactive RF-Magnetron Sputter Deposition
윤선진 Japanese Journal of Applied Physics, v.47 no.4, pp.3067-3069 |
22 |
원문
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학술지
|
2007 |
Rapid Vapor-Phase Fabrication of Organic-Inorganic Hybrid Superlattices with Monolayer Precision
이병훈 Journal of the American Chemical Society, v.129 no.51, pp.16034-16041 |
108 |
원문
|
학술지
|
2007 |
Characteristics of AlxTi1_xOy Films Grown by Plasma-Enhanced Atomic Layer Deposition
임정욱 Journal of the Electrochemical Society, v.154 no.11, pp.G239-G243 |
24 |
원문
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학술지
|
2007 |
Transparent ZnO-TFT Arrays Fabricated by Atomic Layer Deposition
박상희 Electrochemical and Solid-State Letters, v.11 no.1, pp.H10-H14 |
103 |
원문
|
학술지
|
2007 |
Characteristics of Nanocomposite ZrO2/Al2O3 Films Deposited by Plasma-Enhanced Atomic Layer Deposition
윤선진 Journal of Nanoscience and Nanotechnology, v.7 no.11, pp.4180-4184 |
|
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학술지
|
2007 |
Characteristics of Pentacene Thin Film Transistor with Al2O3 Gate Dielectrics on Plastic Substrate
임정욱 Electrochemical and Solid-State Letters, v.10 no.10, pp.J36-J38 |
8 |
원문
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학술지
|
2007 |
Stress Reduction of Ge2Sb2Te5 Crystallization by Capping Al2O3 Film Grown by PEALD
박영삼 ECS Transactions, v.11 no.7, pp.245-248 |
2 |
원문
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학술대회
|
2007 |
Application of Atomic Layer Deposition for the Transparent Display
박상희 International Conference on Atomic Layer Deposition (ALD) 2007, pp.1-1 |
|
|
학술대회
|
2007 |
Improvement of Stability in ZnO TFT Under Bias Stress
황치선 Society for Information Display (SID) International Symposium 2007, pp.237-240 |
6 |
원문
|
학술지
|
2007 |
Pentacene-Thin Film Transistors with ZrO2 Gate Dielectric Layers Deposited by Plasma-Enhanced Atomic Layer Deposition
윤선진 Electrochemical and Solid-State Letters, v.10 no.3, pp.H90-H93 |
10 |
원문
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학술지
|
2007 |
Sublithographic Vertical Gold Nanogap for Label-free Electrical Detection of Protein-ligand Binding
장동윤 Journal of Vacuum Science and Technology B, v.25 no.2, pp.443-447 |
48 |
원문
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학술지
|
2006 |
Threshold Voltage Control of Pentacene Thin-Film Transistor with Dual-Gate Structure
구재본 Journal of Information Display, v.7 no.3, pp.27-30 |
6 |
원문
|
학술대회
|
2006 |
High-K Nano-Composite ZrO2/Al2O3 Films Deposited by Plasma-Enhanced Atomic Layer Deposition
윤선진 International Conference on Nano Science and Nano Technology (GJ-NST) 2009, pp.1-25 |
|
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학술지
|
2006 |
Performance Improvement of Ultralow Temperature Polycrystalline Silicon TFT on Plastic Substrate by Plasma Oxidation of Polycrystalline Si Surface
김용해 IEEE Electron Device Letters, v.27 no.11, pp.896-898 |
10 |
원문
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학술지
|
2006 |
Pentacene Thin-Film Transistors and Inverters with Dual-Gate Structure
구재본 Electrochemical and Solid-State Letters, v.9 no.11, pp.G320-G322 |
9 |
원문
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학술대회
|
2006 |
1.5 μm InAlGaAsllnP VCSELs with A1203 Embedded Apertures
송현우 IEEE Lasers and Electro-Optics Society (LEOS) Meeting 2006, pp.444-445 |
0 |
원문
|
학술대회
|
2006 |
Characteristics of ZrAlO Films Deposited by Plasma Enhanced Atomic Layer Deposition
윤선진 The Electrochemical Society (ECS) Meeting 2006, pp.1-2 |
|
|
학술대회
|
2006 |
Transparent ZnO Transistor Array by Means of Plasma Enhanced Atomic Layer Deposition
박상희 International Meeting on Information Display 2006, pp.601-604 |
|
|
학술대회
|
2006 |
Plasma-Enhanced Atomic Layer Deposition of ZrO2 film and the Performance of Pentacene thin film Transistor with ZrO2 Gate Dielectric Layer
윤선진 International Conference on Atomic Layer Deposition Workshop (ALD) 2006, pp.1-1 |
|
|
학술대회
|
2006 |
Plasma Enhanced Atomic Layer Deposition of Vanadium Oxide using Tetrakis(Ethylmethylamino) Vanadium and O2 as Precursors
윤선진 International Conference on Atomic Layer Deposition Workshop (ALD) 2006, pp.1-1 |
|
|
학술지
|
2006 |
Long-wavelength InAlGaAs VCSELs with Al2O3 Embedded Current-confinement Apertures
송현우 Electronics Letters, v.42 no.14, pp.808-809 |
4 |
원문
|
학술대회
|
2006 |
Transparent ZnO Thin Film Transistor Array for the Application of Transparent AM-OLED Display
박상희 International Symposium, Seminar and Exhibition (SID) 2006, pp.25-28 |
41 |
원문
|
학술대회
|
2006 |
Switching Mechanism of TiO2 thin Films Deposited by Plasma-Enhanced Atomic Layer Deposition
유민기 MRS Meeting 2006 (Spring), pp.1-1 |
|
|
학술지
|
2006 |
Comparative study on Chemical Stability of Dielectric Oxide Films under HF Wet and Vapor Etching for Radiofrequency Microelectromechanical System Application
양우석 Thin Solid Films, v.500 no.1-2, pp.231-236 |
18 |
원문
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학술대회
|
2006 |
Low-Voltage Pentacene Transistors and Inverters with Plasma-Enhanced Atomic Layer Deposited Gate Dielectrics
구재본 MRS Meeting 2006 (Spring), pp.1-14 |
|
|
학술대회
|
2006 |
Plasma-Enhanced Atomic Layer Deposition 기술을 이용한 ZrOB 2B 박막 증착 공정에서 증착 온도와 Plasma Pulse Width가 박막 특성에 미치는 효과
윤선진 한국반도체 학술 대회 (KCS) 2006, pp.1-2 |
|
|
학술지
|
2006 |
Electrical Properties of Aluminum Silicate Films Grown by Plasma Enhanced Atomic Layer Deposition
임정욱 Electrochemical and Solid-State Letters, v.9 no.1, pp.F8-F11 |
9 |
원문
|
학술지
|
2005 |
Effect of Plasma on Characteristics of Zirconium Oxide Films Deposited by Plasma-Enhanced Atomic Layer Deposition
윤선진 Electrochemical and Solid-State Letters, v.8 no.11, pp.F47-F50 |
27 |
원문
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학술대회
|
2005 |
Characteristics of ZNO thin Films by Means of Plasma Atomic Layer Deposition
박상희 ECS Transactions, pp.125-130 |
1 |
원문
|
학술지
|
2005 |
Characteristics of Aluminum Silicate Films Grown by Plasma-Enhanced Atomic Layer Deposition
임정욱 Electrochemical and Solid-State Letters, v.8 no.9, pp.F25-F28 |
15 |
원문
|
학술지
|
2005 |
Ultrathin Film Encapsulation of an OLED by ALD
박상희 Electrochemical and Solid-State Letters, v.8 no.2, pp.21-23 |
140 |
원문
|
학술지
|
2005 |
Low-Temperature Growth of SiO2 Films by Plasma-Enhanced Atomic Layer Deposition
임정욱 ETRI Journal, v.27 no.1, pp.118-121 |
67 |
원문
|
학술지
|
2004 |
High-Performance Ultralow-Temperature Polycrystalline Silicon TFT Using Sequential Lateral Solidification
김용해 IEEE Electron Device Letters, v.25 no.8, pp.550-552 |
27 |
원문
|