Registered VERTICAL CAPACITORS AND METHODS OF FORMING THE SAME

Inventors

Kim Seong-Il, Eun Soo Nam, Mun Jae Kyoung, Jongmin Lee, Lee Sang-Heung, Min Byoung-Gue, Hyung Sup Yoon, Jong-Won Lim

Application No.

13618873 (2012.09.14)

Publication No.

20130134554 (2013.05.30)

Registration No.

8853821 (2014.10.07)

Country

UNITED STATES

Project Code

11ZB1100, Development support for customer-based convergence components, Eun Soo Nam

Abstract

Provided are vertical capacitors and methods of forming the same. The formation of the vertical capacitor may include forming input and output electrodes on a top surface of a substrate, etching a bottom surface of the substrate to form via electrodes, and then, forming a dielectric layer between the via electrodes. As a result, a vertical capacitor with high capacitance can be provided in a small region of the substrate.

KSP Keywords

Bottom surface, High capacitance, Input-Output, dielectric layer