Inventors

Sun Jin Yun, Lee Kyu Sung, Lim Jungwook

Application No.

14/621739 (2015.02.13)

Registration No.

10153141 (2018.12.11)

Country

UNITED STATES

Project Code

13MB2100, Development of a-Si/SiGe tandem structure thin film solar cells of conversion efficiency 13% on flexible metal substrate, Sun Jin Yun

KSP Keywords

Plasma process, Process equipment