저항식 전자기계적 접촉을 이용하는 미세 전자기계적 소자
양우석, 정성혜, 김윤태, 강성원
- 6963117 (2005.11.08)
- A microelectromechanical device that transmits an electric signal using mechanical contact between conductors is provided. The microelectromechanical device has a conductive oxide layer on at least one of contacting surfaces of the conductors. The conductor may be a signal line or a contact pad. According to the microelectromechanical device, the signal line or the contact pad is coated with the conductive oxide layer, thereby preventing the occurrence of micro-welding problem due to resistive heat. As a result, a reliability and a power handling of a microelectromechanical device can be improved.
- KSP 제안 키워드
- Conductive oxide, Electric signal, Mechanical contact, Microelectromechanical devices, Oxide layer, Power handling, Signal line