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특허 검색
구분 출원국
출원년도 ~ 키워드

상세정보

등록 저항식 전자기계적 접촉을 이용하는 미세 전자기계적 소자

저항식 전자기계적 접촉을 이용하는 미세 전자기계적 소자
이미지 확대
발명자
양우석, 정성혜, 김윤태, 강성원
출원번호
10230563 (2002.08.29)
공개번호
20030222321 (2003.12.04)
등록번호
6963117 (2005.11.08)
출원국
미국
협약과제
초록
A microelectromechanical device that transmits an electric signal using mechanical contact between conductors is provided. The microelectromechanical device has a conductive oxide layer on at least one of contacting surfaces of the conductors. The conductor may be a signal line or a contact pad. According to the microelectromechanical device, the signal line or the contact pad is coated with the conductive oxide layer, thereby preventing the occurrence of micro-welding problem due to resistive heat. As a result, a reliability and a power handling of a microelectromechanical device can be improved.
KSP 제안 키워드
Conductive oxide, Electric signal, Mechanical contact, Microelectromechanical devices, Oxide layer, Power handling, Signal line