상세정보
등록 축전식 미세전자기계적 스위치 및 그 제조 방법
- 출원번호
- 10329390 (2002.12.27)
- 공개번호
- 20030151879 (2003.08.14)
- 등록번호
- 6867467 (2005.03.15)
- 출원국
- 미국
- 협약과제
- 초록
- The present invention relates to a capacitive micro-electro-mechanical switch and method of manufacturing the same. In the capacitive micro-electro-mechanical switch for use in the radio frequency (RF) and the microwave driven by the electrostatic force, a capacitor of a 3-dimensional structure is formed on a signal transmission line. An ON capacitance is increased without increasing an capacitor area while preventing an increase in an OFF capacitance using the capacitor. Thus, an ON/OFF capacitance ratio of the capacitive micro-electro-mechanical switch can be increased and insertion loss and isolation characteristic could be improved.
- KSP 제안 키워드
- 3-Dimensional structure, 3-dimensional, Capacitance Ratio, Electro-mechanical, Electrostatic force, Radio Frequency(RF), Radio frequency (rf), Signal transmission, Transmission line, capacitor area, dimensional structure, insertion loss, mechanical switch
- 패밀리
| 구분 | 특허 | 출원국 | KIPRIS |
|---|---|---|---|
| 등록 | 축전식 미세전자기계적 스위치 및 그 제조 방법 | 대한민국 | KIPRIS |