축전식 미세전자기계적 스위치 및 그 제조 방법
양우석, 정성혜, 김윤태, 강성원
- 6867467 (2005.03.15)
- The present invention relates to a capacitive micro-electro-mechanical switch and method of manufacturing the same. In the capacitive micro-electro-mechanical switch for use in the radio frequency (RF) and the microwave driven by the electrostatic force, a capacitor of a 3-dimensional structure is formed on a signal transmission line. An ON capacitance is increased without increasing an capacitor area while preventing an increase in an OFF capacitance using the capacitor. Thus, an ON/OFF capacitance ratio of the capacitive micro-electro-mechanical switch can be increased and insertion loss and isolation characteristic could be improved.
- KSP 제안 키워드
- 3-Dimensional structure, 3-dimensional, Capacitance Ratio, Electro-mechanical, Electrostatic force, Radio Frequency(RF), Radio frequency (rf), Signal transmission, Transmission line, capacitor area, dimensional structure, insertion loss, mechanical switch