미세전자기계적 시스템 기술을 이용한 고주파 소자
강성원, 정성혜, 양우석, 김윤태
- 6750742 (2004.06.15)
- Provided is a radio frequency device using a micro-electronic-mechanical system (MEMS) technology that can be applied to a mobile communication area by reducing the operating voltage, while increasing the operating speed. The RF device of the present research includes: a substrate; a first electrode which is mounted on the substrate and forms an actuator, part of the first electrode not contacting the substrate; and a second electrode which is apart in a regular space from the substrate and forms an actuator, part of the second electrode being overlapped with the first electrode, wherein the first electrode and the second electrode contact each other at a contact point by an electrostatic attractive force generated between the two electrodes.
- KSP 제안 키워드
- Attractive force, Contact point, Electrode contact, Operating speed, RF device, Radio Frequency(RF), mechanical system, mobile communication, operating voltage