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성과물

특허 검색
구분 출원국
출원년도 ~ 키워드

상세정보

등록 미세전자기계적 구조스위치 및 그 제조방법

미세전자기계적 구조스위치 및 그 제조방법
이미지 확대
발명자
이재우, 강성원, 제창한
출원번호
11440863 (2006.05.24)
공개번호
20070170460 (2007.07.26)
등록번호
7585113 (2009.09.08)
출원국
미국
협약과제
초록
A MEMS switch and a method of manufacturing the same are disclosed. The MEMS switch includes: a substrate including a trench, a ground line and a signal line having an opened portion; a moving plate separated from the substrate at a predetermined space and including a contact member for connecting an electrode plate and the opened portion and having a deep corrugate to insert the trench; and a supporting member for supporting the moving plate. Such a MEMS switch prevents the thermal expansion and the stiction problem.
KSP 제안 키워드
Electro-mechanical, Electrode Plate, MEMS Switch, Micro-electro-mechanical system(MEMS), Moving plate, Signal line, Thermal Expansion, mechanical system