매립된 단열 구조를 가진 마이크로 가스센서
전치훈, 고상춘, 표현봉, 박선희
- 7963147 (2011.06.21)
- Provided are a micro gas sensor for measuring a gas concentration configured to achieve a high heating and cooling rate of a gas sensitive layer, achieve temperature uniformity, and achieve durability against thermal impact and mechanical impact; and a method for manufacturing the micro gas sensor. The micro gas sensor includes: a vacuum cavity disposed in a substrate; a support layer covering the vacuum cavity; a sealing layer sealing the support layer and the vacuum cavity; a micro heater disposed on the sealing layer; a plurality of electrodes disposed on the micro heater, insulated from the micro heater; and a gas sensitive layer covering the electrodes.
- KSP 제안 키워드
- Cooling Rate, Heating and cooling, Heating and cooling rate, Mechanical impact, Micro gas sensor, Micro-heater, Sensitive layer, Support layer, Temperature Uniformity, Thermal Impact, Vacuum Cavity, gas concentration, gas sensors, sealing layer