ETRI-Knowledge Sharing Plaform

ENGLISH

성과물

특허 검색
구분 출원국
출원년도 ~ 키워드

상세정보

등록 매립된 단열 구조를 가진 마이크로 가스센서

매립된 단열 구조를 가진 마이크로 가스센서
이미지 확대
발명자
전치훈, 고상춘, 표현봉, 박선희
출원번호
11951986 (2007.12.06)
공개번호
20080134753 (2008.06.12)
등록번호
7963147 (2011.06.21)
출원국
미국
협약과제
초록
Provided are a micro gas sensor for measuring a gas concentration configured to achieve a high heating and cooling rate of a gas sensitive layer, achieve temperature uniformity, and achieve durability against thermal impact and mechanical impact; and a method for manufacturing the micro gas sensor. The micro gas sensor includes: a vacuum cavity disposed in a substrate; a support layer covering the vacuum cavity; a sealing layer sealing the support layer and the vacuum cavity; a micro heater disposed on the sealing layer; a plurality of electrodes disposed on the micro heater, insulated from the micro heater; and a gas sensitive layer covering the electrodes.
KSP 제안 키워드
Cooling Rate, Heating and cooling, Heating and cooling rate, Mechanical impact, Micro gas sensor, Micro-heater, Sensitive layer, Support layer, Temperature Uniformity, Thermal Impact, Vacuum Cavity, gas concentration, gas sensors, sealing layer
패밀리
 
패밀리 특허 목록
구분 특허 출원국 KIPRIS
등록 마이크로 가스 센서 및 그 제조방법 대한민국