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성과물

특허 검색
구분 출원국
출원년도 ~ 키워드

상세정보

등록 마이크로 가스 센서 및 그 제작 방법

마이크로 가스 센서 및 그 제작 방법
이미지 확대
발명자
전치훈, 고상춘, 정문연, 박선희
출원번호
12142695 (2008.06.19)
공개번호
20090151429 (2009.06.18)
등록번호
7861575 (2011.01.04)
출원국
미국
협약과제
초록
A micro gas sensor is disclosed including a substrate; an open cavity formed in the substrate; an electrode pad separation groove formed on the substrate; a first and a second electrode pads formed over the substrate and electrically insulated from each other by the electrode pad separation groove; a micro heater connected to the first electrode pad and configured of a bridge structure suspended over the open cavity; a first sensing electrode extending from the first electrode pad and suspended over the open cavity; a second sensing electrode extending from the first electrode pad and suspended over the open cavity; and a gas sensing film electrically coupled to the micro heater and filling a gap between the first and the second sensing electrodes.
KSP 제안 키워드
Bridge structure, Gas sensing, Manufacturing method, Micro gas sensor, Micro-heater, Open cavity, Sensing electrodes, Sensing film, gas sensing film, gas sensors