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구분 출원국
출원년도 ~ 키워드

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등록 정전용량형 MEMS 진동센서의 진동극성 및 크기 감지를 위한 양극성 구동회로

정전용량형 MEMS 진동센서의 진동극성 및 크기 감지를 위한 양극성 구동회로
이미지 확대
발명자
이성식, 이명래, 박지만, 정성혜, 황건, 최창억, 제창한
출원번호
12168025 (2008.07.03)
공개번호
20090056448 (2009.03.05)
등록번호
7997137 (2011.08.16)
출원국
미국
협약과제
초록
There is provided a bidirectional readout circuit for detecting direction and amplitude of an oscillation sensed at a capacitive microelectromechanical system (MEMS) accelerometer, the bidirectional readout circuit converting capacitance changes of the capacitive MEMS accelerometer into a time change amount by using high resolution capacitance-to-time conversion technology and outputting the time change amount as the direction and the amplitude of the oscillation by using time-to-digital conversion (TDC) technology, thereby detecting not only the amplitude of the oscillation but also the direction thereof, which is capable of being applied to various MEMS sensors.
KSP 제안 키워드
Capacitive MEMS, Capacitive MEMS accelerometer, High-resolution, MEMS accelerometers, MEMS sensor, Micro-electro-mechanical system(MEMS), Microelectromechanical system (mems), Time-to-digital, readout circuit, time change, time-to-digital conversion(TDC)