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구분 출원국
출원년도 ~ 키워드

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등록 바이오 센서 및 그 제조 방법

바이오 센서 및 그 제조 방법
이미지 확대
발명자
김태엽, 박래만, 유한영, 양종헌, 장문규
출원번호
12195305 (2008.08.20)
공개번호
20090152597 (2009.06.18)
등록번호
8022444 (2011.09.20)
출원국
미국
협약과제
초록
Provided are a biosensor with a silicon nanowire and a method of manufacturing the same, and more particularly, a biosensor with a silicon nanowire including a defect region formed by irradiation of an electron beam, and a method of manufacturing the same. The biosensor includes: a silicon substrate; a source region disposed on the silicon substrate; a drain region disposed on the silicon substrate; and a silicon nanowire disposed on the source region and the drain region, and having a defect region formed by irradiation of an electron beam. Therefore, by irradiating a certain region of a high-concentration doped silicon nanowire with an electron beam to lower electron mobility in the certain region, it is possible to maintain a low contact resistance between the silicon nanowire and a metal electrode and to lower operation current of a biomaterial detection part, thereby improving sensitivity of the biosensor.
KSP 제안 키워드
Contact resistance(73.40.Cg), Electron Beam, High concentration, Low contact resistance, Silicon nanowires(SiNWs), Silicon substrate, Source region, doped silicon, electron mobility, metal electrode