상세정보
등록 압전 소자 마이크로폰, 스피커, 마이크로폰-스피커 일체형 장치 및 그 제조방법
- 출원번호
- 12195311 (2008.08.20)
- 공개번호
- 20090154735 (2009.06.18)
- 등록번호
- 8114697 (2012.02.14)
- 출원국
- 미국
- 협약과제
- 초록
- A piezoelectric microphone, a speaker, a microphone-speaker integrated device and a manufacturing method thereof are provided. The microphone-speaker integrated device includes a silicon substrate and an insulating layer deposited on the silicon substrate; a piezoelectric plate formed on the insulating layer; and a mating electrode formed on the piezoelectric plate. The mating electrode is patterned with a polarity arrayed in series.
- KSP 제안 키워드
- Manufacturing method, Piezoelectric microphone, Piezoelectric plate, Silicon substrate, insulating layer, integrated device