나노점을 이용한 바이오 센서 및 그 제조 방법
김태엽, 안창근, 아칠성, 유한영, 장문규, 양종헌
- 8058673 (2011.11.15)
- A biosensor using a nanodot and a method of manufacturing the same are provided. A silicon nanowire can be formed by a CMOS process to reduce manufacturing costs. In addition, an electrically charged nanodot is coupled to a target molecule to be detected, in order to readily change conductivity of the silicon nanowire, thereby making it possible to implement a biosensor capable of providing good sensitivity and being manufactured at a low cost.
- KSP 제안 키워드
- CMOS Process, Low-cost, Silicon nanowires(SiNWs), manufacturing cost, target molecule