도넛형태의 촉매금속층을 이용한 실리콘 나노튜브 제조방법
박래만, 김상협, 박종혁, 맹성렬
- 7985666 (2011.07.26)
- Provided is a method of manufacturing silicon nanowires including: forming a silicon nanodot thin film having a plurality of silicon nanodots exposed on a substrate; and growing the silicon nanowires on the silicon nanodot thin film using the silicon nanodots as a nucleation site. The silicon nanowires can be manufactured using the silicon nanodot thin film disposed in a silicon nitride matrix, as a nucleation site instead of using catalytic metal islands, wherein the silicon nanodot thin film includes the silicon nanodots.
- KSP 제안 키워드
- Catalytic metal, Metal islands, Nucleation sites, Silicon Nitride, Silicon nanodots, Silicon nanowires(SiNWs), thin film(TF)