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구분 출원국
출원년도 ~ 키워드

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등록 정전용량형 환경유해가스 센서 및 그 제조방법

정전용량형 환경유해가스 센서 및 그 제조방법
이미지 확대
발명자
문제현, 이수재, 박진아, 정태형
출원번호
12502824 (2009.07.14)
공개번호
20100133528 (2010.06.03)
등록번호
7816681 (2010.10.19)
출원국
미국
협약과제
초록
A capacitive gas sensor and a method of fabricating the same are provided. The capacitive gas sensor includes an insulating substrate, a metal electrode and a micro thin-film heater wire integrally formed on the same plane of the insulating substrate, and an oxide detection layer coated on the metal electrode and the micro thin-film heater wire. The fabrication method includes depositing a metal layer on an insulating substrate, etching the metal layer so that a metal electrode and a micro thin-film heater wire form an interdigital transducer on the same plane, and forming a nano crystal complex oxide thin film or a complex oxide nano fiber coating layer on the metal electrode and the micro thin-film heater wire as a detecting layer. The capacitive gas sensor can be easily fabricated and can have excellent characteristics such as high sensitivity, high selectivity, high stability, and low power consumption.
KSP 제안 키워드
Capacitive gas sensor, Fabrication method, Fiber coating, High Sensitivity, Low-Power, Nano crystal, Nano fiber, Oxide thin films, Power Consumption, coating layer, complex oxide, film heaters, gas sensors, high selectivity, high stability, insulating substrate, interdigital transducer, low power consumption, metal electrode, metal layer, thin film(TF), thin film heaters
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구분 특허 출원국 KIPRIS
등록 정전용량형 산화물 환경유해가스 센서 및 그 제조방법 대한민국 KIPRIS