상세정보
등록 광통신을 위한 회절격자 커플러를 포함하는 반도체 집적회로 및 그 형성 방법
- 출원번호
- 12684677 (2010.01.08)
- 공개번호
- 20100111469 (2010.05.06)
- 등록번호
- 8165437 (2012.04.24)
- 출원국
- 미국
- 협약과제
- 초록
- Provided are semiconductor integrated circuits including a grating coupler for optical communication and methods of forming the same. The semiconductor integrated circuit includes: a cladding layer disposed on a semiconductor substrate; a grating coupler including an optical waveguide on the cladding layer and a grating on the optical waveguide; and at least one reflector formed in the cladding layer below the grating.
- KSP 제안 키워드
- Cladding layer, Integrated circuit, Optical waveguides, Semiconductor integrated, grating coupler, optical communications, semiconductor substrate