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특허 검색
구분 출원국
출원년도 ~ 키워드

상세정보

등록 수직축 방향 가속도계

수직축 방향 가속도계
이미지 확대
발명자
제창한, 장문규, 최창억, 고상춘
출원번호
12783789 (2010.05.20)
공개번호
20110138913 (2011.06.16)
등록번호
8544326 (2013.10.01)
출원국
미국
협약과제
초록
Provided is a vertical accelerometer for measuring acceleration applied perpendicular to a substrate to increase sensitivity thereof. The vertical accelerometer includes a substrate, and a plurality of unit vertical accelerometers, each having a detection mass disposed on the substrate to be rotated by acceleration applied perpendicular to the substrate, and a detection electrode formed at the detection mass. Here, the unit vertical accelerometers are provided to be in contact with the detection electrodes to detect the acceleration through variation in capacitance due to variation in area in which the contacted detection electrodes overlaps each other.