광송신소자와 모니터링 포토다이오드가 하이브리드 집적된 광도파로 플랫폼
김현수, 박미란, 정종술, 최병석, 권오균
- 9042686 (2015.05.26)
- Disclosed are an optical waveguide platform with integrated active transmission device and monitoring photodiode. The optical waveguide platform with hybrid integrated optical transmission device and optical active device includes an optical waveguide region formed by stacking a lower cladding layer, a core layer and an upper cladding layer on a substrate; a trench region formed by etching a portion of the optical waveguide region; and a spot expanding region formed on the core layer in the optical waveguide region, in which the optical transmission device is mounted in the trench region and the optical active device is flip-chip bonded to the spot expanding region. The monitoring photodiode is flip-chip bonded to the spot expanding region of the core layer of the optical waveguide, thereby monitoring output light including an optical coupling loss that occurs during flip-chip bonding.
- KSP 제안 키워드
- Active devices, Cladding layer, Coupling loss, Flip-chip bonding, Optical coupling, Optical waveguides, Transmission device, chip bonding, flip chip, optical active, optical transmission