상세정보
등록 비접촉 두께 측정 장치 및 그것의 두께 측정 방법
- 출원번호
- 13802198 (2013.03.13)
- 공개번호
- 20140061475 (2014.03.06)
- 등록번호
- 9228826 (2016.01.05)
- 출원국
- 미국
- 협약과제
- 초록
- A contactless thickness measuring apparatus is provided which includes an terahertz transmitter configured to receive the first optical path signal from the coupler and to generate a terahertz continuous wave using the first optical signal and an applied bias; an optical delay line configured to delay the second optical path signal output from the coupler; and an terahertz receiver configured to receive the terahertz continuous wave penetrating a sample and to detect an optical current using the terahertz continuous wave and the second optical path signal delayed. A thickness of the sample is a value corresponding to the optical current which phase value becomes a constant regardless of a plurality of measurement frequencies.
- KSP 제안 키워드
- Optical delay, Optical path, Optical signal, Terahertz receiver, Thickness measuring, applied bias, continuous wave(CW), delay line, measuring apparatus, optical delay line