ETRI-Knowledge Sharing Plaform

ENGLISH

성과물

특허 검색
구분 출원국
출원년도 ~ 키워드

상세정보

등록 전극 센서 및 그 제조방법

발명자
김용희, 정상돈, 백남섭, 김국화
출원번호
13944715 (2013.07.17)
공개번호
20140020936 (2014.01.23)
등록번호
9173281 (2015.10.27)
출원국
미국
협약과제
초록
Provide are an electrode sensor and a method of fabricating the same. the method may include providing a substrate with a first electrode, forming a resist layer on the substrate to cover the first electrode, patterning the resist layer to expose a portion of the first electrode, forming an insulating layer on the substrate, removing the insulating layer on the resist layer and the resist layer to form a well in the insulating layer, and forming a second electrode in the well to be electrically connected to the first electrode. According to the method, it is possible to prevent the first electrode from being damaged. In addition, the second electrode may be configured have an increased surface area, and thus, the electrode can have low impedance.
KSP 제안 키워드
Low impedance, Surface Area, insulating layer, resist layer