압전 마이크로 에너지 수확기 및 이의 제조 방법
전치훈, 고상춘, 문종태
- 9293689 (2016.03.22)
- A piezoelectric micro energy harvester and manufacturing method thereof, the method including: forming an insulation film on a substrate; patterning the insulation film and forming an electrode pad pattern, a center electrode pattern, and a side electrode pattern; forming an open cavity at an inside of the substrate for suspension of the center electrode pattern and the side electrode pattern; disposing a conductive film on the electrode pad pattern, the center electrode pattern, and the side electrode pattern and forming electrode pads, a center electrode, and a side electrode; and forming a piezoelectric film so as to cover a space between the center electrode and the side electrode and upper surfaces of the center electrode and the side electrode.
- KSP 제안 키워드
- Conductive film, Electrode pattern, Manufacturing method, Micro energy harvester, Open cavity, Space between, energy harvester, piezoelectric film