간극제한장치를 이용한 초소형 고감도 정전용량형 가속도계
제창한, 이명래, 정성혜, 황건, 최창억
- 8113054 (2012.02.14)
06MB3500, 유비쿼터스용 CMOS 기반 MEMS 복합센서기술개발,
- A conventional capacitive accelerometer has a limitation in reducing a distance between a sensing electrode and a reference electrode, and requires a complex process and a separate method of correcting a clearance difference caused by a process error. However, the capacitive accelerometer of the present invention has high sensitivity, can be simply manufactured by maintaining a very narrow distance between a reference electrode and a sensing electrode, and can make it unnecessary to individually correct each manufactured accelerometer by removing or drastically reducing a functional difference due to a process error.
- KSP 제안 키워드
- Capacitive accelerometer, High Sensitivity, Process error, Sensing electrode, Stopper system, complex process, reference electrode