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성과물

특허 검색
구분 출원국
출원년도 ~ 키워드

상세정보

등록 간극제한장치를 이용한 초소형 고감도 정전용량형 가속도계

간극제한장치를 이용한 초소형 고감도 정전용량형 가속도계
이미지 확대
발명자
제창한, 이명래, 정성혜, 황건, 최창억
출원번호
12517068 (2007.12.05)
공개번호
20100050771 (2010.03.04)
등록번호
8113054 (2012.02.14)
출원국
미국
협약과제
06MB3500, 유비쿼터스용 CMOS 기반 MEMS 복합센서기술개발, 최창억
초록
A conventional capacitive accelerometer has a limitation in reducing a distance between a sensing electrode and a reference electrode, and requires a complex process and a separate method of correcting a clearance difference caused by a process error. However, the capacitive accelerometer of the present invention has high sensitivity, can be simply manufactured by maintaining a very narrow distance between a reference electrode and a sensing electrode, and can make it unnecessary to individually correct each manufactured accelerometer by removing or drastically reducing a functional difference due to a process error.
KSP 제안 키워드
Capacitive accelerometer, High Sensitivity, Process error, Sensing electrode, Stopper system, complex process, reference electrode