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특허 검색
구분 출원국
출원년도 ~ 키워드

상세정보

등록 비접촉 두께 측정 장치 및 그것의 두께 측정 방법

비접촉 두께 측정 장치 및 그것의 두께 측정 방법
이미지 확대
발명자
류한철, 한상필, 김남제, 박경현, 박정우, 고현성
출원번호
13802198 (2013.03.13)
공개번호
20140061475 (2014.03.06)
등록번호
9228826 (2016.01.05)
출원국
미국
협약과제
11SF1600, 포토닉스 기반 포터블 테라헤르츠 분광기 기술 개발, 박경현
초록
A contactless thickness measuring apparatus is provided which includes an terahertz transmitter configured to receive the first optical path signal from the coupler and to generate a terahertz continuous wave using the first optical signal and an applied bias; an optical delay line configured to delay the second optical path signal output from the coupler; and an terahertz receiver configured to receive the terahertz continuous wave penetrating a sample and to detect an optical current using the terahertz continuous wave and the second optical path signal delayed. A thickness of the sample is a value corresponding to the optical current which phase value becomes a constant regardless of a plurality of measurement frequencies.
KSP 제안 키워드
Optical delay, Optical path, Optical signal, Terahertz receiver, Thickness measuring, applied bias, continuous wave(CW), delay line, measuring apparatus, optical delay line