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Registered TUNABLE-WAVELENGTH OPTICAL FILTER AND METHOD OF MANUFACTURING THE SAME

실리콘/실리콘산화막 다층구조 적층형 파장가변 광 필터 제작
이미지 확대
Inventors
Chang Auck Choi, Lee Myung Lae, Jun Chi Hoon, Kim Chang-Kyu, Kim Youn Tae
Application No.
11045554 (2005.01.27)
Publication No.
20050157392 (2005.07.21)
Registration No.
7012752 (2006.03.14)
Country
UNITED STATES
Project Code
01MB4700, Development of Large-Scale MOEMS Devices for Optical Cross-Connect, Jun Chi Hoon
Abstract
An active type tunable wavelength optical filter having a Fabry-Perot structure is disclosed. A tunable wavelength optical filter which comprises a lower mirror in which silicon films and oxide films are sequentially laminated in a multi-layer and the silicon film is laminated on the highest portion; an upper mirror in which silicon films and oxide films are sequentially laminated in a multi-layer and the silicon film is laminated on the highest portion and which is spaced away from the lower mirror by a predetermined distance; a connecting means for connecting and supporting the lower mirror and the upper mirror to a semiconductor substrate; and electrode pads for controlling the gap between the lower mirror and the upper mirror by an electrostatic force and the method of manufacturing the same are provided. Thereby, by finely driving the upper and lower mirrors composed of a multi-layer structure of the silicon film and the oxide film by the electrostatic force, the wavelength of the transmitted light with respect to the incident light can be selectively sent.
KSP Keywords
Electrostatic force, Fabry-perot, Layer structure, Optical filters, Oxide film, Silicon film, Transmitted light, multi-layer, multilayer structure, semiconductor substrate, tunable wavelength