실리콘/실리콘산화막 다층구조 적층형 파장가변 광 필터 제작
최창억, 이명래, 전치훈, 김창규, 김윤태
- 7012752 (2006.03.14)
01MB4700, 광 회선분배용 대용량 MOEMS 소자 기술,
- An active type tunable wavelength optical filter having a Fabry-Perot structure is disclosed. A tunable wavelength optical filter which comprises a lower mirror in which silicon films and oxide films are sequentially laminated in a multi-layer and the silicon film is laminated on the highest portion; an upper mirror in which silicon films and oxide films are sequentially laminated in a multi-layer and the silicon film is laminated on the highest portion and which is spaced away from the lower mirror by a predetermined distance; a connecting means for connecting and supporting the lower mirror and the upper mirror to a semiconductor substrate; and electrode pads for controlling the gap between the lower mirror and the upper mirror by an electrostatic force and the method of manufacturing the same are provided. Thereby, by finely driving the upper and lower mirrors composed of a multi-layer structure of the silicon film and the oxide film by the electrostatic force, the wavelength of the transmitted light with respect to the incident light can be selectively sent.
- KSP 제안 키워드
- Electrostatic force, Fabry-perot, Layer structure, Optical filters, Oxide film, Silicon film, Transmitted light, multi-layer, multilayer structure, semiconductor substrate, tunable wavelength