정전용량형 MEMS 진동센서의 진동극성 및 크기 감지를 위한 양극성 구동회로
이성식, 이명래, 박지만, 정성혜, 황건, 최창억, 제창한
- 7997137 (2011.08.16)
07MB2500, 유비쿼터스용 CMOS 기반 MEMS 복합센서기술개발,
- There is provided a bidirectional readout circuit for detecting direction and amplitude of an oscillation sensed at a capacitive microelectromechanical system (MEMS) accelerometer, the bidirectional readout circuit converting capacitance changes of the capacitive MEMS accelerometer into a time change amount by using high resolution capacitance-to-time conversion technology and outputting the time change amount as the direction and the amplitude of the oscillation by using time-to-digital conversion (TDC) technology, thereby detecting not only the amplitude of the oscillation but also the direction thereof, which is capable of being applied to various MEMS sensors.
- KSP 제안 키워드
- Capacitive MEMS, Capacitive MEMS accelerometer, High-resolution, MEMS accelerometers, MEMS sensor, Micro-electro-mechanical system(MEMS), Microelectromechanical system (mems), Time-to-digital, readout circuit, time change, time-to-digital conversion(TDC)