상세정보
등록 정전용량형 MEMS 진동센서의 진동극성 및 크기 감지를 위한 양극성 구동회로
- 출원번호
- 12168025 (2008.07.03)
- 공개번호
- 20090056448 (2009.03.05)
- 등록번호
- 7997137 (2011.08.16)
- 출원국
- 미국
- 협약과제
- 07MB2500, 유비쿼터스용 CMOS 기반 MEMS 복합센서기술개발, 최창억
- 초록
- There is provided a bidirectional readout circuit for detecting direction and amplitude of an oscillation sensed at a capacitive microelectromechanical system (MEMS) accelerometer, the bidirectional readout circuit converting capacitance changes of the capacitive MEMS accelerometer into a time change amount by using high resolution capacitance-to-time conversion technology and outputting the time change amount as the direction and the amplitude of the oscillation by using time-to-digital conversion (TDC) technology, thereby detecting not only the amplitude of the oscillation but also the direction thereof, which is capable of being applied to various MEMS sensors.
- KSP 제안 키워드
- Capacitive MEMS, Capacitive MEMS accelerometer, High-resolution, MEMS accelerometers, MEMS sensor, Micro-electro-mechanical system(MEMS), Microelectromechanical system (mems), Time-to-digital, readout circuit, time change, time-to-digital conversion(TDC)