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Registered Method of fabricating phase-change memory devices using solid-state reaction

고상 반응을 이용하는 상변화 메모리 소자 및 그 제조 방법
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Inventors
Lee Seung-Yun, Byoung Gon Yu, Soon-Won Jung, Park Young Sam, Yoon Sung Min
Application No.
13110579 (2011.05.18)
Publication No.
20110223716 (2011.09.15)
Registration No.
8470719 (2013.06.25)
Country
UNITED STATES
Abstract
Provided are a nonvolatile memory device and a method of fabricating the same, in which a phase-change layer is formed using a solid-state reaction to reduce a programmable volume, thereby lessening power consumption. The device includes a first reactant layer, a second reactant layer formed on the first reactant layer, and a phase-change layer formed between the first and second reactant layers due to a solid-state reaction between a material forming the first reactant layer and a material forming the second reactant layer. The phase-change memory device consumes low power and operates at high speed.
KSP Keywords
High Speed, Low-Power, Non-Volatile Memory(NVM), Nonvolatile memory devices, Phase Change Material(PCM), Phase change, Power Consumption, material forming, memory device, solid state, solid-state reaction