상세정보
등록 검출 소자
- 출원번호
- 13122273 (2009.05.27)
- 공개번호
- 20110180856 (2011.07.28)
- 등록번호
- 8426900 (2013.04.23)
- 출원국
- 미국
- 협약과제
- 08MC4400, 가정용 고감도 배뇨분석 센서 모듈, 성건용
- 초록
- Provided is a sensing device, which includes a reactive material layer (260) responding to a specific functional group in a fluid, a sensing capacitor (B) including first and second electrodes disposed on and under an insulating layer (230), the first electrode being disposed under the reactive material layer (260), and a field effect transistor including a gate electrode connected with the first electrode of the sensing capacitor. Here, the reactive material layer (260) is formed in a conductive three-dimensional structure to widen a surface area. Thus, the sensing device may have high sensitivity by maximizing a capacitor sharing effect and a change in voltage amount applied to a gate, which may be caused by widening a surface area of the conductive three-dimensional structure with respect to the fluid flow.
- KSP 제안 키워드
- Field-effect transistors(FETs), Fluid flow, Functional group, High Sensitivity, Reactive material, Sensing device, Surface Area, Three dimensional(3D), Three-dimensional structure, capacitor sharing, dimensional structure, field effect, gate electrode, insulating layer