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Registered THE SENSING DEVICE

검출 소자
이미지 확대
Inventors
Chang-Geun Ahn, Gun Yong Sung, Park Chan Woo, Chil Seong Ah, Kim Ansoon, Baek In Bok, Tae-Youb Kim, Yang Jong-Heon
Application No.
13122273 (2009.05.27)
Publication No.
20110180856 (2011.07.28)
Registration No.
8426900 (2013.04.23)
Country
UNITED STATES
Project Code
08MC4400, Home Care Sensor Module for Highly Sensitive Urinalysis, Gun Yong Sung
Abstract
Provided is a sensing device, which includes a reactive material layer (260) responding to a specific functional group in a fluid, a sensing capacitor (B) including first and second electrodes disposed on and under an insulating layer (230), the first electrode being disposed under the reactive material layer (260), and a field effect transistor including a gate electrode connected with the first electrode of the sensing capacitor. Here, the reactive material layer (260) is formed in a conductive three-dimensional structure to widen a surface area. Thus, the sensing device may have high sensitivity by maximizing a capacitor sharing effect and a change in voltage amount applied to a gate, which may be caused by widening a surface area of the conductive three-dimensional structure with respect to the fluid flow.
KSP Keywords
Field-effect transistors(FETs), Fluid flow, Functional group, High Sensitivity, Reactive material, Sensing device, Surface Area, Three dimensional(3D), Three-dimensional structure, capacitor sharing, dimensional structure, field effect, gate electrode, insulating layer