볼로미터용 저항재료, 이를 이용한 적외선 검출기용 볼로미터, 및 이의 제조방법
양우석, 조성목, 전상훈, 류호준, 최창억
- 8143579 (2012.03.27)
09MB1600, 유비쿼터스용 CMOS 기반 MEMS 복합센서기술개발,
- A resistive material for a bolometer, a bolometer for an infrared detector using the material, and a method of manufacturing the bolometer are provided. In the resistive material, at least one element selected from the group consisting of nitrogen (N), oxygen (O) and germanium (Ge) is included in antimony (Sb). The resistive material has superior properties such as high temperature coefficient of resistance (TCR), low resistivity, a low noise constant, and is easily formed in a thin film structure by sputtering typically used in a complementary metal-oxide semiconductor (CMOS) process, so that it can be used as a resistor for the bolometer for an uncooled infrared detector, and thus provide the infrared detector with superior temperature precision.
- KSP 제안 키워드
- Coefficient of resistance, Complementary metal-oxide-semiconductor(CMOS), Film structure, High Temperature, Low noise, Metal-oxide(MOX), Oxide semiconductor, Temperature Coefficient, Uncooled infrared detector, infrared detector, low resistivity, metal oxide semiconductor, temperature coefficient of resistance(TCR), thin film(TF), thin film structure