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학술지 Effect of the Electrode Materials on the Drain-Bias Stress Instabilities of In-Ga-Zn-O Thin-Film Transistors
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저자
박준용, 양신혁, 유민기, 박상희, 황치선, 윤성민
발행일
201209
출처
ACS Applied Materials & Interfaces, v.4 no.10, pp.5369-5374
ISSN
1944-8244
출판사
American Chemical Society(ACS)
DOI
https://dx.doi.org/10.1021/am301253x
협약과제
12VB1300, 에너지 절감을 위한 7인치기준 2W급 환경적응 디스플레이 신모드 핵심 원천 기술 개발, 추혜용
초록
The effects of electrode materials on the device stabilities of In-Ga-Zn-O (IGZO) thin-film transistors (TFTs) were investigated under gate- and/or drain-bias stress conditions. The fabricated IGZO TFTs with a top-gate bottom-contact structure exhibited very similar transfer characteristics between the devices using indium-tin oxide (ITO) and titanium electrodes. Typical values of the mobility and threshold voltage of each device were obtained as 13.4 cm 2 V -1 s -1 and 0.72 V (ITO device) and 13.8 cm 2 V -1 s -1 and 0.66 V (titanium device). Even though the stabilities examined under negative and positive gate-bias stresses showed no degradation for both devices, the instabilities caused by the drain-bias stress were significantly dependent on the types of electrode materials. The negative shifts of the threshold voltage for the ITO and titanium devices after the 10 4-s-long drain-bias stress were estimated as 2.06 and 0.96 V, respectively. Superior characteristics of the device using titanium electrodes after a higher temperature annealing process were suggested to originate from the formation of a self-limiting barrier layer at interfaces by nanoscale observations using transmission electron microscopy. © 2012 American Chemical Society.
키워드
bias stress, device reliability, electrode, In-Ga-Zn-O, oxide semiconductor, thin-film transistor
KSP 제안 키워드
As 2, Barrier layers, Bias stress, Bottom contact, Contact structure, Device reliability, Device stability, IGZO TFTs, In-Ga-Zn-O(IGZO), Oxide semiconductor, Self-limiting