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학술지 Influence of Titania Cladding on SOI Grating Coupler and 5 μm-Radius Ring Resonator
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저자
이종무
발행일
201503
출처
Optics Communications, v.338, pp.101-105
ISSN
0030-4018
출판사
Elsevier
DOI
https://dx.doi.org/10.1016/j.optcom.2014.10.039
협약과제
13VB5800, 실리콘 포토닉스 기반 SDN용 12채널 4x8 광스위치 모듈 개발, 이종무
초록
Titania cladding is deposited on a 5 μm-radius silicon-on-insulator ring resonator and grating couplers which are patterned by deep-ultraviolet lithography. The influence of titania cladding is studied by measuring the transmission spectra of the ring resonator coupled to a pair of single-mode fibers through the grating couplers. Temperature dependent wavelength shift of TE-like mode through the ring resonator is reduced to -20 to +20 pm/K from 74 pm/K without a noticeable degradation of insertion loss through the ring and the transmission peak of grating coupler is shifted at about 50 nm by the addition of titania cladding.
키워드
Integrated optics, Waveguides
KSP 제안 키워드
Deep-ultraviolet, Integrated optics, Silicon On Insulator(SOI), Silicon-on-insulator ring resonator, Single-mode fiber(SMF), Temperature-dependent, Transmission spectra, Ultraviolet lithography, grating coupler, insertion loss, wavelength shift