상세정보
학술지
Accurate Quantification of Cu(In,Ga)Se2 Films by AES Depth Profiling Analysis
- 저자
- 장종식, 황혜현, 강희재, 채홍철, 정용덕, 김경중
- 발행일
- 201310
- 출처
- Applied Surface Science, v.282, pp.777-781
- ISSN
- 0169-4332
- 출판사
- Elsevier Science, Elsevier
- 초록
- Quantitative analysis of Cu(In,Ga)Se 2 (CIGS) films with non-uniform depth distributions was investigated by Auger electron spectroscopy (AES) depth profiling. The atomic fractions of the CIGS films were measured by relative sensitivity factors determined by a total number counting method from a CIGS reference film certified by isotope dilution-inductively coupled plasma/mass spectrometry. In the AES depth profiling analysis of the CIGS films, the intensities of Auger electron peaks in Cu, In, Ga and Se were determined by integrating the individual Auger peak intensities in the whole depth range of the AES depth profiles. The atomic fractions measured by AES analysis were linearly proportional to the certified values. The uncertainty in the AES depth profiling analysis of CIGS films was much smaller than that in the secondary ion mass spectrometry depth profiling analysis and that in the international comparison of national metrology institutes for the quantification of Fe-Ni alloy films. © 2013 Elsevier B.V. All rights reserved.
- 키워드
- AES, Chemical composition, CIGS, Depth profiling
- KSP 제안 키워드
- AES analysis, AES depth profiles, AES depth profiling, Alloy films, Auger Electron Spectroscopy, CIGS film, Counting method, Depth distributions, Depth profiling(DP), Depth range, Fe-Ni alloy